CVD deposition actual result list
PE-CVD | LP-CVD | Low temperature CVD | Atmospheric pressure CVD | W-CVD |
SiO2 | SiN | SiO2 | NSG | W |
TEOS | Poly-Si | SiN | PSG | |
SiN | a-Si | BPSG |
PE-CVD | LP-CVD | Low temperature CVD | Atmospheric pressure CVD | W-CVD |
SiO2 | SiN | SiO2 | NSG | W |
TEOS | Poly-Si | SiN | PSG | |
SiN | a-Si | BPSG |